Y.Nishioka: "Ultrathin MOS gate insulators:surface preparation,growth,and interface control" Silicon Nitride and Silicon Dioxide thin Insulating. 97-10. 347-362 (1997)
Y.Nishioka: "Ultrathin MOS gate insulators:surface preparation,growth,and interface control" Silicon Nitride and Silicon Dioxide thin Insulating. 97-10. 347-362 (1997)
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Y.Nishioka:“超薄 MOS 栅极绝缘体:表面处理、生长和界面控制”氮化硅和二氧化硅薄绝缘体。
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