Discharge modes and wave structures using loop antennae in a helicon plasma source
Discharge modes and wave structures using loop antennae in a helicon plasma source
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在螺旋等离子体源中使用环形天线的放电模式和波结构
DOI：
10.1088/0741-3335/42/1/305
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发表时间：
2000
影响因子：
2.2
通讯作者：
K. Yonekura
中科院分区：
文献类型：
--
作者：
S. Shinohara;K. Yonekura
采用双环天线，通过改变天线波数谱，以及改变填充气压P和磁场B，成功地控制了螺旋等离子体源中密度跳跃分离的放电模式。对于与反平行的天线电流方向的波激励的情况下，密度跳跃的阈值功率P th，不管B和P，是大于在平行方向的情况下，和P th变得更大，在这两种情况下，随着B的增加。从激发波的结构可以看出，在高场条件下，跳跃后观察到螺旋波等离子体，而在低场条件下，无论密度区如何，或者在跳跃前的高场条件下，观察到电感耦合等离子体，没有观察到低混杂波和Trivelpiece-Gould波对等离子体产生的主要作用。
Discharge modes separated by density jumps in a helicon plasma source were controlled successfully by changing the antenna wavenumber spectrum with a two-loop antenna, in addition to varying the filling pressure P and the magnetic field B . For the case of wave excitation with the anti-parallel antenna current direction, the threshold power P th for a density jump, regardless of B and P , was larger than in the case of a parallel direction, and P th became larger with the increase in B in both cases. From the excited wave structures, it was found that the helicon wave plasma was observed after the jump with the high field, while with the low field regardless of the density region or with the high field before the jump, an inductively coupled plasma was found. No indication of a major role of the lower hybrid wave and Trivelpiece-Gould wave on the plasma production was observed.