One-Step Photolithographic Surface Patterning of Nanometer-Thick Gold Surfaces by Using a Commercial DLP Projector and the Fabrication of a Microheater
One-Step Photolithographic Surface Patterning of Nanometer-Thick Gold Surfaces by Using a Commercial DLP Projector and the Fabrication of a Microheater
复制标题
DOI：
10.1021/acs.iecr.9b05837
复制
发表时间：
2020-07-01
影响因子：
4.2
通讯作者：
Stark, Wendelin J.
中科院分区：
文献类型：
--
作者：
Gregorini, Michele;Grass, Robert N.;Stark, Wendelin J.
提出了一种一步光刻法对镀金和镀铜表面进行图案化。通过光触发局部释放亚铁氰化钾溶液中的氰化物来选择性地蚀刻金属。氰化物对金的特定位置溶解是非常快的，基本上是不可逆的。一个任意可配置的光图案可以产生一个商业数字光处理（DLP）投影仪直接指向浸没样品的表面。该程序只需要最少的预处理和后处理操作以及无毒的化学品。作为应用实例，介绍了小型双区差热器的快速制造。
A one-step photolithographic approach to patterning gold- and copper-coated surfaces is presented. The metal is selectively etched by the light-triggered local release of cyanide from a potassium ferrocyanide solution. The site-specific dissolution of gold by cyanide is extremely fast and essentially irreversible. An arbitrarily configurable light pattern can be produced with a commercial Digital Light Processing (DLP) projector directly pointed at the surface of the submerged sample. This procedure requires only minimal pre- and postprocessing operations and nontoxic chemicals. As an example of application, the rapid fabrication of a small two-zone differential heater is presented.