System design of a single-shot reconfigurable null test using a spatial light modulator for freeform metrology
System design of a single-shot reconfigurable null test using a spatial light modulator for freeform metrology
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DOI：
10.1364/ol.44.002000
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发表时间：
2019-04-15
期刊：
影响因子：
3.6
通讯作者：
Rolland, Jannick P.
中科院分区：
文献类型：
--
作者：
Chaudhuri, Romita;Papa, Jonathan;Rolland, Jannick P.
报道了利用高清晰度纯位相型空间光调制器(SLM)进行自适应干涉零测试的模拟，以测量偏离基球150微米的自由曲面反射镜的形状和中频。最先进的商用SLM被建模为可重构的相位计算机生成全息图(CGH)，其产生的零位相函数的幅度接近于比可变形反射镜高出一个数量级。由SLM的像素化和相位量化引起的形状测量的理论不确定度为50.62 nm RMS。详细介绍了硬件实现的校准要求。(C)2019年美国光学学会
We report the simulation of an adaptive interferometric null test using a high-definition phase-only spatial light modulator (SLM) to measure form and mid spatial frequencies of a freeform mirror with a sag departure of 150 mu m from its base sphere. A state-of-the-art commercial SLM is modeled as a reconfigurable phase computer generated hologram (CGH) that generates a nulling phase function with close to an order of magnitude higher amplitude than deformable mirrors. The theoretical uncertainty in form measurement arising from pixelation and phase quantization of the SLM is 50.62 nm RMS. The calibration requirements for hardware implementation are detailed. (c) 2019 Optical Society of America