Nanotribology and MEMS
Nanotribology and MEMS
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DOI：
10.1016/s1748-0132(07)70140-8
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发表时间：
2007-10-01
期刊：
影响因子：
17.4
通讯作者：
Dugger, Michael T.
中科院分区：
文献类型：
--
作者：
Kim, Seong H.;Asay, David B.;Dugger, Michael T.
当固体物体接触时，就会产生粘着、摩擦和磨损等摩擦学现象。随着器件尺寸缩小到微米和纳米尺度，表面积与体积比增加，与表面力（货车德瓦尔斯、毛细管、静电和化学键合）相比，体积力（重力和惯性）的影响变得微不足道。在微机电系统（MEMS）中，摩擦力和静态界面力与驱动器件运动的力相当。在这种情况下，宏观润滑和磨损缓解方法，如使用散装流体和微米厚的涂层，是无效的;新的纳米工程方法必须采用移动结构的MEMS器件。我们回顾了与微纳米机械接触相关的基本摩擦学问题以及MEMS润滑的发展。
The tribological phenomena of adhesion, friction, and wear arise when solid objects make contact. As the size of devices shrinks to micro- and nanoscales, the surface-to-volume ratio increases and the effects of body forces (gravity and inertia) become insignificant compared with those of surface forces (van der Waals, capillary, electrostatic, and chemical bonding). In microelectromechanical systems (MEMS), tribological and static interfacial forces are comparable with forces driving device motion. In this situation, macroscale lubrication and wear mitigation methods, such as the use of bulk fluids and micrometer thick coatings, are ineffective; new nano-engineering approaches must be employed for MEMS devices with moving structures. We review fundamental tribological problems related to micro- and nanoscale mechanical contacts and developments in MEMS lubrications.