Enhancement of high-order harmonics radiations around 13.5 nm by a long-interaction gas tube and its application to development of photoresist materials
Enhancement of high-order harmonics radiations around 13.5 nm by a long-interaction gas tube and its application to development of photoresist materials
复制标题
长相互作用气体管增强13.5 nm左右高次谐波辐射及其在光刻胶材料开发中的应用
DOI：
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发表时间：
2022
期刊：
影响因子：
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通讯作者：
Kawachi Tetsuya
中科院分区：
文献类型：
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作者：
Shinichi Namba;J. Seres;E. Seres;C. Serrat;Thanhhung Dinh;Hasegawa Noboru;Ishino Masahiko;Yamamoto Hiroki;Nishikino Masaharu;Kawachi Tetsuya
