Superplastic nanoforming of optical components of Pt-based metallic glass
Superplastic nanoforming of optical components of Pt-based metallic glass
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DOI：
10.1016/j.jallcom.2006.08.126
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发表时间：
2007-05
影响因子：
6.2
通讯作者：
Y. Saotome;Y. Fukuda;I. Yamaguchi;A. Inoue
中科院分区：
文献类型：
--
作者：
Y. Saotome;Y. Fukuda;I. Yamaguchi;A. Inoue
金属玻璃由于其在纳米尺度上的粘性和均匀性而可用于制造纳米器件。在这项研究中，我们开发的光学元件的金属玻璃超塑性纳米成形。金属玻璃在玻璃化转变温度和结晶温度之间的过冷温度范围内表现出牛顿粘性流动。本研究使用玻璃化转变温度为502K的Pt基金属玻璃。将该材料应用于反射式干涉光学元件，并通过超塑性纳米成形技术制作了衍射光栅（间隔1μm）和全息图。模具由Ni电铸制成，母模由干涉图案的光刻法制造。在10MPa的压应力下，Pt基金属玻璃的工作温度为540K。结果表明，超塑性纳米成形技术在金属玻璃和光学元件的大规模生产的优势。
Metallic glasses are useful for fabricating nanodevices due to their viscosity and homogeneity on nanometer scales. In this study, we developed optical components of metallic glasses by superplastic nanoforming. Metallic glasses exhibit Newtonian viscous flow in a supercooled temperature range between the glass transition temperature and the crystallization temperature. This study used Pt-based metallic glass with a glass transition temperature of 502K. This material was applied to reflective interference optical components, and a diffraction grating (1μm interval) and a hologram were fabricated by superplastic nanoforming. Dies were made by Ni-electroforming, with master models fabricated by photolithography of the interference pattern. The working temperature of Pt-based metallic glass was 540K under a compressive stress of 10MPa. The results demonstrated the advantages of the superplastic nanoforming technique on metallic glass and for mass production of optical components.