Effect of oxygen addition to methane on growth of vertically oriented carbon nanotubes by radio-frequency plasma enhanced chemical vapor deposition

Effect of oxygen addition to methane on growth of vertically oriented carbon nanotubes by radio-frequency plasma enhanced chemical vapor deposition
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甲烷中添加氧气对射频等离子体增强化学气相沉积垂直取向碳纳米管生长的影响

DOI:
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发表时间:
2005
期刊:
J.Appl.Phys. 97
影响因子:
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通讯作者:
Takashi Ikuno
Takashi Ikuno
中科院分区:
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文献类型:
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作者:
田中慎一;菅野誉士;川合知二(分担執筆);Winadda Wongwiriyapan;Takashi Ikuno;Katsunori Aoki;Chih-Wei Chang;Takashi Ikuno;Takashi Ikuno

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