Planar Solenoidal Inductor in Radio Frequency Micro-Electro-Mechanical Systems Technology for Variable Inductor with Wide Tunable Range and High Quality Factor
Planar Solenoidal Inductor in Radio Frequency Micro-Electro-Mechanical Systems Technology for Variable Inductor with Wide Tunable Range and High Quality Factor
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DOI：
10.1143/jjap.51.05ee02
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发表时间：
2012-05-01
影响因子：
1.5
通讯作者：
Masu, Kazuya
中科院分区：
文献类型：
--
作者：
Shirane, Atsushi;Ito, Hiroyuki;Masu, Kazuya
为实现宽可调范围、高质量因数（q因子）的可变电感，提出了一种平面螺线管电感。采用双金属微机电系统（MEMS）工艺设计和制造了原型电感器，以演示电感和q因子可调性的潜在用途。实现了1 ~ 3.3 nH的电感调谐，在2ghz下可调谐性高达230%。在2.5 ~ 6 GHz的频率范围内，q因子大于20。(C) 2012，日本应用物理学会
A planar solenoidal inductor for the realization of a variable inductor with a wide tunable range and a high quality factor (Q-factor) is proposed in this work. Prototype inductors are designed and fabricated using a two-metal micro-electro-mechanical systems (MEMS) process to demonstrate the potential use of the tunability of the inductance and the Q-factor. Inductance tuning from 1 to 3.3 nH was achieved and the tunability obtained was as high as 230% at 2 GHz. A Q-factor of more than 20 was observed in the frequency range of 2.5 to 6 GHz. (C) 2012 The Japan Society of Applied Physics