Thin Films of Molybdenum Disulfide Doped with Chromium by Aerosol-Assisted Chemical Vapor Deposition (AACVD)
Thin Films of Molybdenum Disulfide Doped with Chromium by Aerosol-Assisted Chemical Vapor Deposition (AACVD)
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DOI：
10.1021/cm504532w
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发表时间：
2015-02-24
影响因子：
8.6
通讯作者：
O'Brien, Paul
中科院分区：
文献类型：
--
作者：
Lewis, David J.;Tedstone, Aleksander A.;O'Brien, Paul
用气溶胶辅助化学气相沉积(AACVD)方法制备了掺铬二硫化钼(MoS_2)薄膜。三(二乙基二硫代氨基甲酸)铬(III)也可用于硫化铬(CRS)的沉积。用扫描电子显微镜(SEM)、能量色散X射线(EDX)、拉曼光谱和粉末X射线衍射(PXRD)等技术对薄膜进行了分析，以阐明薄膜的形貌、成分和结晶度。在MoS_2薄膜中，铬的存在使沉积的薄膜在形态、晶体结构和纳米机械性能上发生了显著的变化。在N-甲基-2-吡咯烷酮中对薄膜进行液相剥离得到的纳米片的扫描电子显微镜(STEM)能谱成像表明，铬掺杂在整个MoS_2中似乎是均匀的。
A combined single-source precursor approach has been developed for the deposition of thin films of Cr-doped molybdenum disulfide (MoS2) by aerosol-assisted chemical vapor deposition (AACVD). Tris-(diethyldithiocarbamato)chromium(III) can also be used for the deposition of chromium sulfide (CrS). Films have been analyzed by a range of techniques including scanning electron microscopy (SEM), energy dispersive X-ray (EDX) spectroscopy, Raman spectroscopy, and powder X-ray diffraction (pXRD) to elucidate film morphology, composition, and crystallinity. The presence of Cr in the MoS2 films produces a number of striking morphological, crystallographic, and nanomechanical changes to the deposited films. The chromium dopant appears to be uniform throughout the MoS2 from the scanning transmission electron microscopy (STEM) EDX spectrum imaging of nanosheets produced by liquid-phase exfoliation of the thin films in N-methyl-2-pyrollidone.