A simple method for fabricating multi-layer PDMS structures for 3D microfluidic chips

A simple method for fabricating multi-layer PDMS structures for 3D microfluidic chips
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DOI:
10.1039/b923101c
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发表时间:
2010-01-01
期刊:
影响因子:
6.1
通讯作者:
Wen, Weijia
Wen, Weijia
中科院分区:
工程技术1区
文献类型:
--
作者:
Zhang, Mengying;Wu, Jinbo;Wen, Weijia

文献摘要

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我们报道了一种制备PDMS多层微流控芯片的简单方法。用三氯(1H,1H,2H,2H-全氟辛基)硅烷对PDMS板材进行表面处理,作为可重复使用的转移层。由于该转移层的透明度和适当的柔性,可以实现图案化的PDMS层的厚度的一致性和良好的对准。表面处理结果通过XPS和接触角测试得到证实,同时测量了不同层之间的结合力,以更好地了解转移过程。我们还设计并制作了几种简单类型的3D PDMS芯片,特别是由6个薄层(每个薄层厚度为50微米)组成的芯片,以展示该技术的潜在应用。用共聚焦显微镜拍摄三维荧光图像,以显示关键部位的空间特征。该制备方法具有快速、简单、重复性好、成本低、机械化大批量生产的特点。
We report a simple methodology to fabricate PDMS multi-layer microfluidic chips. A PDMS slab was surface-treated by trichloro (1H,1H,2H,2H-perfluorooctyl) silane, and acts as a reusable transferring layer. Uniformity of the thickness of the patterned PDMS layer and the well-alignment could be achieved due to the transparency and proper flexibility of this transferring layer. Surface treatment results are confirmed by XPS and contact angle testing, while bonding forces between different layers were measured for better understanding of the transferring process. We have also designed and fabricated a few simple types of 3D PDMS chip, especially one consisting of 6 thin layers (each with thickness of 50 mu m), to demonstrate the potential utilization of this technique. 3D fluorescence images were taken by a confocal microscope to illustrate the spatial characters of essential parts. This fabrication method is confirmed to be fast, simple, repeatable, low cost and possible to be mechanized for mass production.