Modeling the flux of high energy negative ions during reactive magnetron sputtering
Modeling the flux of high energy negative ions during reactive magnetron sputtering
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DOI：
10.1063/1.3247545
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发表时间：
2009-11
影响因子：
3.2
通讯作者：
S. Mahieu;W. Leroy;K. V. Aeken;D. Depla
中科院分区：
文献类型：
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作者：
S. Mahieu;W. Leroy;K. V. Aeken;D. Depla
研究了平面磁控管和旋转圆柱磁控管反应溅射过程中的负离子通量。用能量分辨质谱仪测量了负离子的能量和质量分布。同时，对平面磁控管和旋转圆柱磁控管的高能离子角分布进行了表征。此外，为了模拟高能负离子的能量、质量和角分布，还采用了二元碰撞蒙特卡罗模拟程序SiMTRA。无论是平面磁控管还是旋转圆柱磁控管，所有模拟的分布都与实验观测结果符合得很好。并提出了高能负O-−离子的数量模型。事实上，高能负O-−离子的数量的对数被证明与氧化物靶的二次电子发射产额有关，而这两个参数已知与功函数有关。SiMTRA模拟..。
The negative ion flux during reactive sputtering from planar and rotating cylindrical magnetrons has been studied. Energy resolved mass spectrometry was used to measure the energy and mass distribution of the negative ions. Also the angular distribution of the high energy ions was characterized for planar as well as for rotating cylindrical magnetrons. Besides these measurements, a binary collision Monte Carlo simulation code, SiMTRA, was adapted in order to simulate the energy, mass, and angular distribution of the high energy negative ions. All simulated distributions, for both planar and rotating cylindrical magnetrons, were in excellent correspondence with the experimental observations. Also a model for the amount of high energy negative O− ions was proposed. Indeed, the logarithm of the amount of high energy negative O− ions is shown to be related to the secondary electron emission yield of the oxide target, and these two parameters are known to be related to the work function. The SiMTRA simulations...