Spatial Analytical Surface Structure Mapping for Three-dimensional Micro-shaped Si by Micro-beam Reflection High-energy Electron Diffraction
Spatial Analytical Surface Structure Mapping for Three-dimensional Micro-shaped Si by Micro-beam Reflection High-energy Electron Diffraction
复制标题
微束反射高能电子衍射三维微形硅空间分析表面结构测绘
DOI：
10.1380/ejssnt.2021.13
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发表时间：
2021
影响因子：
0.7
通讯作者：
Hattori Ken
中科院分区：
文献类型：
--
作者：
Nakatsuka Sohei;Imaizumi Taishi;Abukawa Tadashi;Hattori Azusa N.;Tanaka Hidekazu;Hattori Ken
