A wireless batch sealed absolute capacitive pressure sensor
A wireless batch sealed absolute capacitive pressure sensor
复制标题
DOI：
10.1016/s0924-4247(01)00753-1
复制
发表时间：
2001-12-15
影响因子：
4.6
通讯作者：
Najafi, K
中科院分区：
文献类型：
--
作者：
Akar, O;Akin, T;Najafi, K
本文报道了一种由电容传感器和镀金平面线圈组成的无线绝对压力传感器的研制。施加的压力使一个6 μ m厚的硅膜发生偏转，改变了它和玻璃衬底上的金属电极之间形成的电容。由电容器和电感器形成的LC电路的谐振频率随着电容的变化而变化;这种变化通过电感耦合远程感测，从而无需电线连接或植入遥测电路。该传感器是使用溶解晶片工艺制造的，并利用一个硼掺杂的硅膜片支撑在绝缘玻璃基板上。完整的传感器尺寸为2.6 mm x 1.6 mm，集成了一个24匝镀金线圈，测量电感为1.2 μ H。该传感器被设计为针对相对于环境压力在0-50 mmHg范围内的压力变化提供在95-103 MHz范围内的谐振频率变化，从而分别提供160 kHz/mmHg和1553 ppm/mmHg的压力响应度和灵敏度。测得的压力响应度和灵敏度的制造的设备是120 kHz/mmHg和1579 ppm/mmHg，分别。(C)2001 Elsevier Science B. V.保留所有权利。
This paper reports the development of an absolute wireless pressure sensor that consists of a capacitive sensor and a gold-electroplated planar coil. Applied pressure deflects a 6 mum-thin silicon diaphragm, changing the capacitance formed between it and a metal electrode supported on a glass substrate. The resonant frequency of the LC circuit formed by the capacitor and the inductor changes as the capacitance changes; this change is sensed remotely through inductive coupling, eliminating the need for wire connection or implanted telemetry circuits. The sensor is fabricated using the dissolved-wafer process and utilizes a boron-doped silicon diaphragm supported on an insulating glass substrate. The complete sensor measures 2.6 mm x 1.6 mm in size and incorporates a 24-turns gold-electroplated coil that has a measured inductance of 1.2 muH. The sensor is designed to provide a resonant frequency change in the range 95-103 MHz for a pressure change in the range 0-50 mmHg with respect to ambient pressure, providing a pressure responsivity and sensitivity of 160 kHz/mmHg and 1553 ppm/mmHg, respectively. The measured pressure responsivity and sensitivity of the fabricated device are 120 kHz/mmHg and 1579 ppm/mmHg, respectively. (C) 2001 Elsevier Science B.V. All rights reserved.