Declamped Piezoelectric Coefficients in Patterned 70/30 Lead Magnesium Niobate-Lead Titanate Thin Films
Declamped Piezoelectric Coefficients in Patterned 70/30 Lead Magnesium Niobate-Lead Titanate Thin Films
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DOI：
10.1002/adfm.201605014
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发表时间：
2017-03-03
影响因子：
19
通讯作者：
Trolier-McKinstry, Susan
中科院分区：
文献类型：
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作者：
Keech, Ryan;Ye, Linghan;Trolier-McKinstry, Susan
层状压电薄膜的横向细分通过增加畴壁迁移率和消除固有响应而提高了功能特性。本文研究了衬底去封对300 nm厚、菱形、{001}取向铌镁铅-钛酸铅薄膜（70PMN-30PT）在70/30配比下压电系数d（33,f）的局部影响。通过化学溶液沉积在铂化硅衬底上生长的薄膜被图像化成宽度从0.75到9 μ m不等的条形结构。纵向压电系数d（33,f）是通过三种方法（有限元建模、压电响应力显微镜和纳米探针同步加速器x射线衍射）作为图形结构上位置的函数来研究的。发现在200 kV cm（-1）激励下，在自由侧壁处，d（33,f）从箝位值40-50增加到约160 pm V-1。侧壁将部分压电响应衰减到500-600 nm的图案结构中，提高了横向尺寸小于1 μ m（宽厚比3:1）的特征中心的压电响应。所有三种方法的归一化数据都非常一致，定量差异提供了对压电系数及其去箝位行为的场依赖性的见解。
Lateral subdivision of blanket piezoelectric thin films increases the functional properties through both increased domain wall mobility and declamping of the intrinsic response. This work presents the local effects of substrate declamping on the piezoelectric coefficient d(33,f) of 300 nm thick, rhombohedral, {001}-oriented lead magnesium niobate-lead titanate thin films at the 70/30 composition (70PMN-30PT). Films grown by chemical solution deposition on platinized Si substrates are patterned into strip structures ranging from 0.75 to 9 mu m in width. The longitudinal piezoelectric coefficient, d(33,f), is interrogated as a function of position across the patterned structures by three approaches: finite element modeling, piezoresponse force microscopy, and nanoprobe synchrotron X-ray diffraction. It is found that d(33,f) increases from the clamped value of 40-50 to approximate to 160 pm V-1 at the free sidewall under 200 kV cm(-1) excitation. The sidewalls partially declamp the piezoelectric response 500-600 nm into the patterned structure, raising the piezoelectric response at the center of features with lateral dimensions less than 1 mu m (3:1 width to thickness aspect ratio). The normalized data from all three methods are in excellent agreement, with quantitative differences providing insight to the field dependence of the piezoelectric coefficient and its declamping behavior.