Fully Differential Internal Electrostatic Transduction of a Lamé-Mode Resonator

Fully Differential Internal Electrostatic Transduction of a Lamé-Mode Resonator
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拉梅模式谐振器的全差分内部静电传导

DOI：
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发表时间：
2009
期刊：
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems
影响因子：
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通讯作者：
R. T. Howe
R. T. Howe
中科院分区：
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文献类型：
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作者：
M. Ziaei;D. Elata;J. Hsieh;J.;E. Quevy;R. T. Howe

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本文报道了横向驱动lam<s:1>模多晶硅谐振器的平行内部静电转导。该谐振器采用可制造的双纳米间隙工艺制造，可提供超薄高纵横比横向间隙。转导电极被优化放置和定向，以最大限度地提高基本lam<s:1>模式的机电转导效率。采用20v直流极化电压驱动和差分检测128.15 MHz lam<s:1>模谐振器，其运动电阻约为30k¿，空气质量因数Q > 12000。
This paper reports the parallel internal electrostatic transduction of a laterally driven Lamé-mode polysilicon resonator. This resonator is fabricated using a manufacturable double nanogap process that provides ultrathin high-aspect ratio lateral gaps. The transduction electrodes are optimally placed and oriented to maximize electromechanical transduction efficiency for the fundamental Lamé mode. A 128.15 MHz Lamé-mode resonator is driven and sensed differentially with a 20 V DC polarization voltage: the motional resistance is about 30 k¿ and the quality factor Q ≫ 12000 in air.