A Phase Field Model for grain Growth and Thermal Grooving in Thin Films with Orientation Dependent Surface Energy
A Phase Field Model for grain Growth and Thermal Grooving in Thin Films with Orientation Dependent Surface Energy
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DOI：
10.4028/www.scientific.net/ssp.129.89
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发表时间：
2007-11
期刊：
影响因子：
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通讯作者：
N. Moelans;B. Blanpain;P. Wollants
中科院分区：
文献类型：
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作者：
N. Moelans;B. Blanpain;P. Wollants
提出了一种模拟薄膜中晶粒生长和热刻槽的相场模型。该模型考虑了表面自由能的取向依赖性和晶界自由能的取向差依赖性。此外，该模型可以处理不同的机制的凹槽形成，即通过体积扩散，表面扩散，蒸发冷凝，或这些机制的组合。两个晶粒之间的凹槽的演变已经模拟了不同的表面和晶界能和不同的凹槽形成机制。
A phase field model for simulating grain growth and thermal grooving in thin films is presented. Orientation dependence of the surface free energy and misorientation dependence of the grain boundary free energy are included in the model. Moreover, the model can treat different mechanisms for groove formation, namely through volume diffusion, surface diffusion, evaporation-condensation, or a combination of these mechanisms. The evolution of a groove between two grains has been simulated for different surface and grain boundary energies and different groove formation mechanisms.