Focused ion beam micro- and nanoengineering
Focused ion beam micro- and nanoengineering
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DOI：
10.1557/mrs2007.65
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发表时间：
2007-05-01
期刊：
影响因子：
5
通讯作者：
Fu, Yongqi
中科院分区：
文献类型：
--
作者：
Langford, Richard M.;Nellen, Philipp M.;Fu, Yongqi
本文讨论了聚焦离子束微纳米纤维的应用。重点放在说明聚焦离子束和双平台系统的多功能性，以及它们如何补充传统的处理技术。本文分为四个部分：无掩模铣削，离子束光刻，离子注入和技术，如在原位微操纵。
This article discusses applications of focused ion beam micro- and nanofabrication. Emphasis is placed on illustrating the versatility of focused ion beam and dual-platform systems and how they complement conventional processing techniques. The article is divided into four parts: maskless milling, ion beam lithography, ion implantation, and techniques such as in situ micromanipulation.