Growth and Properties of Li2B4O7 Single Crystal for SAW Device Applications
Growth and Properties of Li2B4O7 Single Crystal for SAW Device Applications
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用于 SAW 器件应用的 Li2B4O7 单晶的生长和性能
DOI：
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发表时间：
1983
期刊：
影响因子：
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通讯作者：
S. Matsumura
中科院分区：
文献类型：
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作者：
K. Fukuta;J. Ushizawa;Hitoshi Suzuki;Y. Ebata;S. Matsumura
采用提拉法在沿着X轴和Z轴方向成功地生长出直径达45 mm的大尺寸Li_2B_4O_7单晶。基本的物理和化学性能进行了测定，并从理论和实验的角度研究了基本的SAW性能的各种表面取向和SAW传播方向。有人发现，有有用的基板取向SAW谐振器和窄带SAW滤波器周围的旋转X切割，Z传播，其中SAW传播延迟时间是温度的抛物线函数和SAW耦合因子k2约为1%。当SAW在旋转28°的X切割基片上沿Z方向沿着传播时，在20°C下温度延迟系数（TCD）为零，二阶TCD为0.27 ppm/° C ~ 2，k ~ 2为0.8%，SAW速度为3470 m/s。体波寄生信号响应电平比SAW基波响应电平低-20 dB。
Large Li2B4O7 single crystals, up to 45 mm in diameter, have been successfully grown along the X- and Z-axis by Czochralski technique. Fundamental phsyical and chemical properties were determined, and basic SAW properties were studied for the various surface orientations and SAW propagation directions from theoretical and experimental points of view. It was found that there were useful substrate orientations for SAW resonators and narrow bandpass SAW filters around the rotated X-cut, Z-propagation, where SAW propagation delay time was a parabolic function of temperature and SAW coupling factor k2 was approximately 1%. When a SAW propagates along the Z-direction on the 28° rotated X-cut substrate, the temperature coefficient of delay time (TCD) is zero at 20°C and the second order TCD is 0.27 ppm/°C2, k2 is 0.8% and SAW velocity vs is 3470 m/s. The bulk wave spurious signal response level is lower by -20 dB than the SAW fundamental response level.