Single-shot two-dimensional surface measurement based on spectrally resolved white-light interferometry.
Single-shot two-dimensional surface measurement based on spectrally resolved white-light interferometry.
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DOI：
10.1364/ao.51.004971
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发表时间：
2012-07
期刊：
影响因子：
1.9
通讯作者：
Pei Zhu;Kaiwei Wang
中科院分区：
文献类型：
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作者：
Pei Zhu;Kaiwei Wang
通过分析谱域的相位信息，可以使用光谱分辨白光干涉测量法 (SRWLI) 来获取单帧干涉图的轮廓。我们在此提出一种二维 (2D) SRWLI 方法，可用于测量狭窄的矩形区域。频率梳是通过使用法布里-珀罗 (F-P) 标准具来过滤宽带源而产生的。通过滤波频率梳照明，相邻波长下的干涉图案将分开一小段距离，这使我们能够获得宽度较小的二维轮廓。本文讨论了阶梯样品测量的实验细节。
By analyzing the spectral domain's phase information, one can use spectrally resolved white-light interferometry (SRWLI) to obtain the profile with a single frame of an interferogram. We present here a two-dimensional (2D) SRWLI method that can be applied to measure narrow rectangle areas. A frequency comb is produced by using a Fabry-Perot (F-P) etalon to filter the broadband source. With the filtered frequency comb illumination, the interference patterns under adjacent wavelengths would be separated by a little distance, which enables us to obtain a 2D profile with a small width. The experimental details of measurement on a step sample are discussed in this paper.