A tetrahedral three-facet micro mirror with the inclined deep X-ray process
A tetrahedral three-facet micro mirror with the inclined deep X-ray process
复制标题
倾斜深X射线加工的四面体三面微镜
DOI:
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发表时间:
2001
期刊:
影响因子:
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通讯作者:
S. S. Lee
中科院分区:
文献类型:
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作者:
Dong;K. Gil;S. Chang;D. Jung;N. Y. Park;S. S. Lee