Thermal decomposition routes of CrN hard coatings synthesized by reactive arc evaporation and magnetron sputtering
Thermal decomposition routes of CrN hard coatings synthesized by reactive arc evaporation and magnetron sputtering
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DOI：
10.1016/j.tsf.2008.06.086
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发表时间：
2008-11-28
期刊：
影响因子：
2.1
通讯作者：
Mitterer, C.
中科院分区：
文献类型：
--
作者：
Ernst, W.;Neidhardt, J.;Mitterer, C.
本研究比较了反应电弧蒸镀与磁控溅镀所制备的氮化铬硬质薄膜的热分解特性。涂层材料中的结构变化由原位高温X射线衍射确定，并与同步热分析的结果相关。退火温度高达1440摄氏度在At和加热速率的变化给出了不同的分解动力学的反应电弧蒸发和磁控溅射沉积的材料的见解。两种单相CrN涂层在两个主要反应步骤中在氮的释放下在925 ℃以上开始分解，经由Cr2N的中间步骤成为纯Cr。虽然两种样品从CrN到Cr2N的第一次分解反应的动力学不同，但从Cr2N到Cr的第二步是相似的。考虑到两种沉积涂层的结构、组成和形态的差异及其在热分析期间的演变，可以理解这种行为。(c)2008 Elsevier B.V.保留所有权利。
This study presents a comparison of the thermal decomposition of CrN hard coatings synthesized by reactive arc evaporation and magnetron sputtering. Structural changes in the coating material were determined by in-situ high-temperature X-ray diffraction and correlated to the results of simultaneous thermal analysis. Annealing temperatures up to 1440 degrees C in At and a variation in heating rates gave insights to the different decomposition kinetics for the material deposited by reactive arc evaporation and magnetron sputtering. Both single-phase CrN coatings start to decompose above 925 degrees C under release of nitrogen in two major reaction steps to pure Cr via the intermediate step of Cr2N. While the kinetics for the first decomposition reaction from CrN to Cr2N is different for both samples, the second step from Cr2N into Cr is similar. This behavior can be understood considering the differences in structure, composition, and morphology of both as-deposited coatings and their evolution during thermal analysis. (c) 2008 Elsevier B.V. All rights reserved.