Strain driven phase decomposition in ion-beam sputtered Pr 1− x Ca x MnO 3 films

Strain driven phase decomposition in ion-beam sputtered Pr 1− x Ca x MnO 3 films
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离子束溅射 Pr 1â x Ca x MnO 3 薄膜中应变驱动的相分解

DOI:
10.1155/2015/935167
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发表时间:
2015
影响因子:
--
通讯作者:
Ch. Jooss
Ch. Jooss
中科院分区:
材料科学4区
文献类型:
--
作者:
B. Ifland;J. Hoffmann;T. Kramer;M. Scherff;S. Mildner;Ch. Jooss

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通过物理沉积方法在单晶衬底上沉积异质外延薄膜通常伴随着由于晶格失配和缺陷产生而引起的机械应变。在这里,我们详细分析了应变对离子束溅射制备的 Pr1−XCaXMnO3 薄膜的 Mn 溶解度的影响。结合 X 射线衍射、透射电子显微镜和原位热阶段应力测量的结果,我们提供了强有力的证据,表明沉积过程中的大拉伸应变将钙钛矿相的 Mn 溶解度范围限制在接近化学计量的成分。 Mn 过量会产生 MnOz 沉淀,该沉淀似乎代表了应力松弛路径。就沉淀物的尺寸和密度而言,弛豫过程会受到基底和沉积参数(即沉积温度和所用溅射气体)的选择的影响。
The deposition of heteroepitaxial thin films on single crystalline substrates by means of physical deposition methods is commonly accompanied by mechanical strain due to lattice mismatch and defect generation. Here we present a detailed analysis of the influence of strain on the Mn solubility of Pr1−XCaXMnO3thin films prepared by ion‐beam sputtering. Combining results from X‐ray diffraction, transmission electron microscopy and in situ hot‐stage stress measurements, we give strong evidence that large tensile strain during deposition limits the Mn solubility range of the Perovskite phase to near‐stoichiometric composition. Mn excess gives rise to MnOzprecipitates and the precipitation seems to represent a stress relaxation path. With respect to size and density of the precipitates, the relaxation process can be affected by the choice of substrate and the deposition parameters, that is, the deposition temperature and the used sputter gas.
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