All-in-situ fabrication and characterization of silicon nanowires on TCO/glass substrates for photovoltaic application
All-in-situ fabrication and characterization of silicon nanowires on TCO/glass substrates for photovoltaic application
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DOI：
10.1016/j.solmat.2010.06.021
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发表时间：
2010-11
影响因子：
6.9
通讯作者：
Linwei Yu;B. O’Donnell;P. Alet;P. Cabarrocas
中科院分区：
文献类型：
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作者：
Linwei Yu;B. O’Donnell;P. Alet;P. Cabarrocas
硅纳米线（SiNWs）为开发新一代薄膜硅太阳能电池提供了新的机会，具有增强的光捕获和提高的整体性能。在这里，我们报告了在低成本的TCO/玻璃基板上直接制造sinw基薄膜太阳能电池的全原位工艺。在等离子体增强化学气相沉积系统（PECVD）中，利用h2等离子体表面还原ITO（或SnO2）制备纳米级In（或Sn）催化剂液滴，通过气-液-固生长机制在ITO（或SnO2）衬底上获得SiNWs。研究表明，通过调节生长温度和等离子体条件，可以有效地控制SiNWs的形貌和组成性质，以及SiNWs中的催化剂残留。通过直接在TCO衬底上生长SiNWs，获得了增强的光捕获和吸收效果，吸收边稳定降至~ 1.1eV，表明SiNWs的晶核也参与了光吸收。MM-16椭偏仪实时监测结果表明，长、尖、直SiNW的生长促进了光捕获/吸收的增强。成功展示了基于sinws的薄膜太阳能电池原型。
Silicon nanowires (SiNWs) provide new opportunities for developing a new generation of thin film Si solar cells with enhanced light trapping and increased overall performance. Here, we report on the fabrication of SiNW-based thin film solar cells directly on top of low cost TCO/glass substrates in an all-in-situ process. The SiNWs are obtained on ITO (or SnO2) substrates via vapor–liquid–solid growth mechanism, with the nano-scaled In (or Sn) catalyst droplets prepared by using H2plasma superficial reduction of ITO (or SnO2) in a plasma enhanced chemical vapor deposition system (PECVD). We demonstrate that the morphology and compositional properties of the SiNWs, as well as the catalyst remnant in the SiNWs, can be effectively controlled by tuning the growth temperature and plasma conditions. The enhanced light trapping and absorption effects have been achieved by growing SiNWs directly on top of the TCO substrates, with the absorption edge downshifting steadily to ∼1.1eV, indicating that the crystalline core of the SiNWs also participates in the light absorption. According to a real time monitoring using an in-situ MM-16 ellipsometer, the enhanced light trapping/absorbing effects can be attributed to the growth of long, sharp and straight SiNW. Prototype SiNWs-based thin film solar cells are successfully demonstrated.