Effects of annealing temperature on the mechanical, optical, and electrical properties of hydrogenated, nitrogen-doped diamond-like carbon films
Effects of annealing temperature on the mechanical, optical, and electrical properties of hydrogenated, nitrogen-doped diamond-like carbon films
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DOI:
10.1016/j.tsf.2022.139100
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发表时间:
2022-01
期刊:
影响因子:
2.1
通讯作者:
Hiroya Osanai;Kazuki Nakamura;Yuya Sasaki;Haruto Koriyama;Yasuyuki Kobayashi;Y. Enta;Yu Suzuki;Maki Suemitsu;H. Nakazawa
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文献类型:
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作者:
Hiroya Osanai;Kazuki Nakamura;Yuya Sasaki;Haruto Koriyama;Yasuyuki Kobayashi;Y. Enta;Yu Suzuki;Maki Suemitsu;H. Nakazawa