Accurate 3D coordinate measurement using holographic multipoint technique
Accurate 3D coordinate measurement using holographic multipoint technique
复制标题
使用全息多点技术进行精确的 3D 坐标测量
DOI：
10.1117/12.2555372
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发表时间：
2020
期刊：
影响因子：
--
通讯作者：
W. Osten
中科院分区：
文献类型：
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作者：
S. Hartlieb;C. Erol;M. Tscherpel;T. Haist;F. Guerra;W. Osten
在本文中，我们介绍了一种基于成像的测量设置，能够非常准确地测量移动光源之间的3D相对位置。该系统由两台高速摄像机组成，一台配备远心镜头，另一台配备向心透镜。为了提高基于图像的位置检测的准确性，每个透镜升级为计算机生成的全息图（CGH），以将单个物点复制成图像平面上的预定义图案的斑点。通过平均所有复制的中心，可以减少噪声和其他误差贡献。我们将展示如何使用两种不同的方法来应用图像处理。第一种方法是基于在CPU上运行的跟踪算法，达到330 fps。第二个是FPGA实现，以390 fps的速度处理整个图像。此外，我们将演示如何使用纳米测量和纳米定位机NPMM-200进行三维校准。对于校准，使用三维多变量多项式。在100 mm × 100 mm × 24 mm的体积内进行标定，物方残差标准偏差分别为σx= 0.367 μm，σy= 0.373 μm，σz= 0.437 μm（多项式阶数为9）。
In this contribution we introduce an imaging based measurement setup, that is able to very accurately measure 3D relative positions between moving light sources. The system consists of two highspeed cameras, one equipped with a telecentric, the other with an endocentric lens. To improve accuracy of image based position detection, each lens is upgraded with a computer-generated-hologram (CGH) to replicate a single object point into a predefined pattern of spots on image plane. By averaging the centers of all replications, noise and other error contributions can be reduced. We will show how to apply image processing using two different approaches. The first approach is based on a tracking algorithm running on CPU reaching 330 fps. The second is a FPGA implementation to process whole images with a speed of 390 fps. Furthermore, we will demonstrate how threedimensional calibration can be done using the Nanomeasurement and Nanopositioning Machine NPMM-200. For the calibration, a three-dimensional multivariate polynomial is used. The standard deviations of residual error in object space for a calibration in a volume of 100 mm × 100 mm × 24 mm are σx= 0.367 μm, σy= 0.373 μm and σz= 0.437 μm (polynomial order = 9).