Ti-Zr-V non-evaporable getter films: From development to large scale production for the Large Hadron Collider
Ti-Zr-V non-evaporable getter films: From development to large scale production for the Large Hadron Collider
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DOI：
10.1016/j.tsf.2005.12.218
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发表时间：
2006-10-25
期刊：
影响因子：
2.1
通讯作者：
Pinto, P. Costa
中科院分区：
文献类型：
--
作者：
Chiggiato, P.;Pinto, P. Costa
非蒸发性吸气剂（NEG）合金在其原生氧化物层溶解到本体中后能够泵送超高真空系统中存在的大部分气体。溶解过程，通常称为活化，是通过在真空中加热获得的。NEG材料可以作为薄膜沉积在真空室的内壁上，将其从气体源转变为有效的泵。NEG薄膜开发中最重要的进展是发现了在Ti-Zr-V系统的大范围组成中非常低的活化温度（180 ℃加热24小时）。这种有利的性质与薄膜的纳米晶粒尺寸（约3至5 rim）有关。除了泵浦，NEG薄膜导致减少诱导气体解吸和二次电子产额。因此，Ti-Zr-V薄膜为高能物理和同步辐射设施的现代粒子加速器真空系统中遇到的大多数问题提供了最佳解决方案。在不久的将来，Ti-Zr-V薄膜的最重要的基准将是目前正在欧洲核子研究中心建造的大型强子对撞机（LHC），其中约6公里的束管正在涂覆。一个专门的磁控溅射设备已经建成，以科普大量的真空室（约1200）和紧张的生产时间表。(c)2005 Elsevier B. V.保留所有权利。
Non-evaporable getter (NEG) alloys after dissolution of their native oxide layer into the bulk are able to pump most of the gases present in ultra-high vacuum systems. The dissolution process, commonly called activation, is obtained by heating in vacuum. NEG materials can be sputter-deposited as a thin film on the inner wall of a vacuum chamber, transforming it from a source of gas into an effective pump. The most significant advance in the development of NEG films was the discovery of a very low activation temperature (180 degrees C for 24 h heating) in a large range of compositions of the Ti-Zr-V system. This favourable property was correlated with nanometric grain size of the film (about 3 to 5 rim).In addition to pumping, NEG films lead to reduced induced gas desorption and secondary electron yields. As a consequence, Ti-Zr-V films provide the optimum solution to most of the problems encountered in vacuum systems of modem particle accelerators for high energy physics and for synchrotron radiation facilities. In the near future the most significant benchmark for Ti-Zr-V films will be the Large Hadron Collider (LHC) presently under construction at CERN, where about 6 kin of beam pipe are being coated. A dedicated magnetron sputtering facility has been built to cope with the high number of vacuum chambers (about 1200) and the tight production schedule. (c) 2005 Elsevier B.V. All rights reserved.