New data-processing technique for measurement of metallic foil thickness with differential white-light interferometry
New data-processing technique for measurement of metallic foil thickness with differential white-light interferometry
复制标题
利用差分白光干涉测量金属箔厚度的新数据处理技术
DOI：
10.1016/j.optlaseng.2006.03.007
复制
发表时间：
2007
影响因子：
4.6
通讯作者：
Minmin Zheng
中科院分区：
文献类型：
--
作者：
Yanli Du;Huimin Yan;Yongjun Nie;Xiuda Zhang;Minmin Zheng
采用差示白光干涉法测量了金属箔的厚度。采用两个串联迈克尔逊干涉仪（MI）作为基本干涉测量系统，在光谱仪上获得干涉条纹，其中被测反射面为金属箔表面。因此，干涉条纹仅取决于金属箔厚度引起的路径差。采用基于最小均方根偏差的修正极值法对干涉条纹进行分析。给出了厚度测量的实验结果。厚度为1 ~ 80μm时，测量时间不超过100ms。
The thickness of metallic foil was measured by differential white-light interferometry (DWLI). Two tandem Michelson interferometers (MI), in which the reflective surfaces measured are the surfaces of the metallic foil, were used as a basic interferometry system to obtain interference fringes on a spectrometer. Therefore, the interference fringes depend only on the path differences caused by the thickness of the metallic foil. The interference fringes were analyzed using a modified extremum method based on the least root-mean-square (RMS) deviation. Experimental results for thickness measurements are presented. Measurement time is only 100ms or less for a thickness of 1–80μm.