Simulation of Nano Metal Film Thickness Measurement Based on surface Plasmon Resonance Effect
Simulation of Nano Metal Film Thickness Measurement Based on surface Plasmon Resonance Effect
复制标题
基于表面等离子体共振效应的纳米金属膜厚度测量模拟
DOI:
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发表时间:
2018
期刊:
影响因子:
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通讯作者:
Lang Yaopu
中科院分区:
文献类型:
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作者:
Liu Qinggagn;Xie Xian;Qin Zirui;Lang Yaopu