Uncooled MEMS-based detector arrays for THz imaging applications
Uncooled MEMS-based detector arrays for THz imaging applications
复制标题
用于太赫兹成像应用的基于 MEMS 的非冷却探测器阵列
DOI：
10.1117/12.818766
复制
发表时间：
2009
期刊：
影响因子：
1.9
通讯作者：
E. Dodson
中科院分区：
文献类型：
--
作者：
J. Cox;R. Higashi;F. Nusseibeh;K. Newstrom;C. Zins;R. Osiander;J. Lehtonen;E. Dodson
我们报告了最近开发的基于mems的非冷却太赫兹探测器的实验结果以及由它们构建的线性焦平面阵列的成像应用。该探测器包含一个宽带微天线耦合到一个阻抗匹配的微桥。微型天线的截止频率为500GHz、650GHz和1.5THz，每个天线的带宽为数百GHz。预计探测器的灵敏度和频率响应分别为~6pW/√Hz（带背板）和7kHz，并将介绍第一批器件的配套测量结果。完全集成的1x8线性焦平面阵列已经组装完成，并将用于正在进行的成像演示。
We report experimental results on recently developed MEMS-based, uncooled THz detectors and imaging applications for linear focal plane arrays constructed from them. The detector incorporates a broadband micro-antenna coupled to an impedance-matched microbridge. Micro-antennas were fabricated having cut-on frequencies of 500GHz, 650GHz, and 1.5THz, each with bandwidth of several hundred GHz. Sensitivity and frequency response of the detectors is predicted to be ~6pW/√Hz (with backplane) and 7kHz, respectively, and supporting measurements of the first devices will be presented. Fully integrated 1x8 linear focal plane arrays have been assembled and will be used in on-going imaging demonstrations.