Development of a rapid-response flow-control system using MEMS microvalve arrays
Development of a rapid-response flow-control system using MEMS microvalve arrays
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DOI：
10.1109/jmems.2004.838392
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发表时间：
2004-12-01
影响因子：
2.7
通讯作者：
Bifano, T
中科院分区：
文献类型：
--
作者：
Collier, J;Wroblewski, D;Bifano, T
一种利用微机电系统（MEMS）提供高分辨率气体流量控制的方法已经开发和测试。微机械组件由61个同步微阀组成的阵列并行操作。对不同设计的微阀进行了大量试验，以表征其运行特性。其中性能最好的是与原型流量控制器一起使用。此外，推导了流量系统和控制器的数学模型，以预测系统对各种操作条件变化的响应。本文描述了一个紧凑的、独立的质量流量控制器（MFC）的设计、建模和测试，以演示使用MEMS微阀进行高分辨率、快速响应的流量控制。该装置由一个装有微流量传感器的微阀阵列和一个基于微处理器的控制系统组成。微阀的高带宽允许非典型流量控制架构。该控制器调节发送到阀阵列的脉宽调制（PWM）信号，并具有开环和闭环控制能力。建立了一个数学模型来预测系统在各种工况下的动态性能。MEMS流量控制系统的其他优点包括低功耗、低制造成本和可扩展精度。
A method for providing high-resolution gas flow control using microelectromechanical systems (MEMS) has been developed and tested. The micromachined component consists of an array of 61 synchronized microvalves operating in parallel. A number of tests were conducted on microvalves of various designs to characterize their operation. The best performing of these was used with a prototype flow controller. Additionally, a mathematical model of the flow system and controller was derived to predict the response of the system to various changes in operating conditions. This paper describes the design, modeling, and testing of a compact, stand-alone mass flow controller (MFC) to demonstrate high resolution, fast response flow control using MEMS microvalves. The device consists of a microvalve array packaged with a micro flow sensor and a microprocessor-based control system. The high bandwidth of microvalves allows an atypical flow control architecture. The controller regulates a pulsewidth-modulated (PWM) signal sent to the valve array and is capable of both open- and closed-loop control. A mathematical model was also developed to predict the dynamic performance of the system under various operating conditions. Additional advantages of the MEMS flow-control system include low-power consumption, low fabrication costs, and scalable precision.