Observation of plasma inflow in laser-produced Sn EUV sources contributing to increment of EUV light output using Thomson scattering technique
Observation of plasma inflow in laser-produced Sn EUV sources contributing to increment of EUV light output using Thomson scattering technique
复制标题
使用汤姆逊散射技术观察激光产生的 Sn EUV 源中的等离子体流入有助于增加 EUV 光输出
DOI:
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发表时间:
2022
期刊:
影响因子:
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通讯作者:
Katsunobu Nishihara
中科院分区:
文献类型:
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作者:
Kentaro Tomita;Yiming Pan;Atsushi Sunahara;Katsunobu Nishihara