Effects of Crucible Rotation Rate on Thermal Fluctuations of the Melt Flow in a Cz-Si Crystal Growth
Effects of Crucible Rotation Rate on Thermal Fluctuations of the Melt Flow in a Cz-Si Crystal Growth
复制标题
坩埚转速对长晶硅熔体流动热脉动的影响
DOI:
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发表时间:
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影响因子:
5.2
通讯作者:
Wang Hao
中科院分区:
文献类型:
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作者:
Yu Qinghua;Liu Xin;Liu Lijun;Wang Hao