Investigation on electrical characteristics of TFTs fabricated with germanium films crystallized by atmospheric-pressure micro thermal plasma jet irradiation
Investigation on electrical characteristics of TFTs fabricated with germanium films crystallized by atmospheric-pressure micro thermal plasma jet irradiation
复制标题
常压微热等离子体射流辐照晶化锗薄膜TFT电学特性研究
DOI：
10.35848/1347-4065/ac3d0b
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发表时间：
2022
影响因子：
3.2
通讯作者：
and S. Higashi
中科院分区：
文献类型：
--
作者：
T. Sato;H. Hanafusa;and S. Higashi
