Plasmofluidic Disk Resonators.
Plasmofluidic Disk Resonators.
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DOI：
10.1038/srep23149
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发表时间：
2016-03-16
影响因子：
4.6
通讯作者：
Kim Y
中科院分区：
文献类型：
--
作者：
Kwon MS;Ku B;Kim Y
波导耦合硅环或盘谐振器已用于光信号处理和传感。光学器件的大规模集成要求不断减少其占地面积，最终需要用硅基等离子体共振器取代。然而，到目前为止，很少有波导耦合的硅基等离子体谐振器被实现。此外，流体不能有效地与它们相互作用，因为它们的共振模式强烈地局限于固体区域。为了解决这个问题，本文报道了实现等离子体流体盘谐振器（PDR）。PDR由一个亚微米半径的硅盘和横向围绕盘的金属组成，其间有一个30 nm宽的通道。该通道充满流体，并且PDR的共振模式被强烈地限制在流体中。PDR耦合到金属-绝缘体-硅-绝缘体-金属波导是通过使用标准互补金属氧化物半导体技术来实现的。当流体的折射率增加0.141时，耦合到半径为0.9 μm的PDR的波导的透射谱红移30 nm。PDR可以用作需要非常少量的分析物的折射率传感器。此外，填充液晶的PDR可以是一种超紧凑的强度调制器，其可以通过小的驱动电压来有效地控制。
Waveguide-coupled silicon ring or disk resonators have been used for optical signal processing and sensing. Large-scale integration of optical devices demands continuous reduction in their footprints, and ultimately they need to be replaced by silicon-based plasmonic resonators. However, few waveguide-coupled silicon-based plasmonic resonators have been realized until now. Moreover, fluid cannot interact effectively with them since their resonance modes are strongly confined in solid regions. To solve this problem, this paper reports realized plasmofluidic disk resonators (PDRs). The PDR consists of a submicrometer radius silicon disk and metal laterally surrounding the disk with a 30-nm-wide channel in between. The channel is filled with fluid, and the resonance mode of the PDR is strongly confined in the fluid. The PDR coupled to a metal-insulator-silicon-insulator-metal waveguide is implemented by using standard complementary metal oxide semiconductor technology. If the refractive index of the fluid increases by 0.141, the transmission spectrum of the waveguide coupled to the PDR of radius 0.9 μm red-shifts by 30 nm. The PDR can be used as a refractive index sensor requiring a very small amount of analyte. Plus, the PDR filled with liquid crystal may be an ultracompact intensity modulator which is effectively controlled by small driving voltage.