Electrochemical micromachining of stainless steel by ultrashort voltage pulses
Electrochemical micromachining of stainless steel by ultrashort voltage pulses
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DOI：
10.1524/zpch.217.4.299.20383
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发表时间：
2003-01-01
影响因子：
2.5
通讯作者：
Kück, H
中科院分区：
文献类型：
--
作者：
Cagnon, L;Kirchner, V;Kück, H
在合适的电化学条件下，在微小的工具电极上施加超短电压脉冲，可以实现对不锈钢的精密三维加工。为了达到亚微米级的精度和高的加工速度，必须通过选择合适的电解液来防止在加工过程中在工件表面形成钝化层。浓氢氟酸和盐酸的混合物在这方面非常适合，可以自动加工复杂的三维微元件。详细研究了脉冲宽度和脉冲幅度对加工精度的影响。
Application of ultrashort voltage pulses to a tiny tool electrode under suitable electrochemical conditions enables precise three-dimensional machining of stainless steel. In order to reach submicrometer precision and high processing speed, the formation of a passive layer on the workpiece surface during the machining process has to be prevented by proper choice of the electrolyte. Mixtures of concentrated hydrofluoric and hydrochloric acid are well suited in this respect and allow the automated machining of complicated three-dimensional microelements. The dependence of the machining precision on pulse duration and pulse amplitude was investigated in detail.