Initial results of a full kinetic simulation of RF H− source including Coulomb collision process
Initial results of a full kinetic simulation of RF H− source including Coulomb collision process
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RF H− 源全动力学模拟（包括库仑碰撞过程）的初步结果
DOI：
10.1063/1.4916425
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发表时间：
2015
影响因子：
15
通讯作者：
J. Lettry
中科院分区：
文献类型：
--
作者：
S. Mochizuki;S. Mattei;T. Shibata;K. Nishida;A. Hatayama;J. Lettry
为了更准确地计算氢负离子源射频电感耦合等离子体（RF ICP）的电子能量分布函数（EEDF），对电磁粒子模拟程序（EM-PIC）进行了改进，引入了电子-电子库仑碰撞的影响。采用二元碰撞模型对库仑碰撞过程进行了模拟，并成功地模拟了库仑碰撞过程，初步计算表明，在电子密度ne = 1018 m−3和高气压pH 2 = 3 Pa的条件下，库仑碰撞对电子密度的影响不大，而在高电子密度和低气压的条件下，库仑碰撞对电子密度的影响很小。
In order to evaluate Electron Energy Distribution Function (EEDF) more correctly for radio frequency inductively coupled plasma (RF-ICP) in hydrogen negative ion sources, the Electromagnetic Particle-In-Cell (EM-PIC) simulation code has been improved by taking into account electron-electron Coulomb collision. Binary collision model is employed to model Coulomb collision process and we have successfully modeled it. The preliminary calculation including Coulomb collision has been done and it is shown that Coulomb collision doesn’t have significant effects under the condition: electron density ne ∼ 1018 m−3 and high gas pressure pH2 = 3 Pa, while it is necessary to include Coulomb collision under high electron density and low gas pressure conditions.