Molecular Dynamics Simulation of Poly Acrylic Acid as a Resist Material for Thermal Nanoimprint Lithography Processes

Molecular Dynamics Simulation of Poly Acrylic Acid as a Resist Material for Thermal Nanoimprint Lithography Processes
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聚丙烯酸作为热纳米压印光刻工艺抗蚀剂材料的分子动力学模拟

DOI:
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发表时间:
2020
期刊:
Proceedings of the Industrial Engineers Research Conference 2020
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通讯作者:
Odujole J., Desai S.
Odujole J., Desai S.
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文献类型:
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作者:
Odujole J., Desai S.

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