TECHNOLOGY AND APPLICATIONS OF GRATING INTERFEROMETERS IN HIGH-PRECISION MEASUREMENT
TECHNOLOGY AND APPLICATIONS OF GRATING INTERFEROMETERS IN HIGH-PRECISION MEASUREMENT
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DOI：
10.1016/0141-6359(92)90003-f
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发表时间：
1992-07-01
期刊：
影响因子：
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通讯作者：
TEIMEL, A
中科院分区：
文献类型：
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作者：
TEIMEL, A
在分辨率和测量精度方面，过去几年中出现在市场上的光栅干涉仪通常比在车间条件下在空气中工作的He-Ne激光干涉仪更上级。这些系统的几个独特优势，例如在不断变化的环境空气条件下的良好稳定性，以及通过选择刻度载体材料使热膨胀系数与各个应用相匹配的能力，导致这些系统在高精度测量中的使用越来越多。本文介绍了光栅干涉仪的工作原理和特点，以及基于该技术实现的一些测量系统。
In terms of resolution and measuring accuracy, the grating interferometers that have appeared on the market during the past few years are often superior to He-Ne laser interferometers operating in air under workshop conditions. Several specific advantages such as good stability under changing ambient air conditions and the ability to match the thermal expansion coefficient to individual applications by means of the choice of the scale carrier material are leading to increased use of these systems in high-precision measurement. This paper describes the operating principle and characteristics of grating interferometers as well as some measuring systems that have been realized based on this technology.