Three-coordinate measurement of an object surface with a combined two-wavelength and two-source phase-shifting speckle interferometer
Three-coordinate measurement of an object surface with a combined two-wavelength and two-source phase-shifting speckle interferometer
复制标题
双波长双源相移散斑干涉仪对物体表面的三坐标测量
DOI：
10.1016/0030-4018(94)00711-3
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发表时间：
1995
期刊：
影响因子：
--
通讯作者：
W. Schreiber
中科院分区：
文献类型：
--
作者：
T. Maack;G. Notni;W. Schreiber
在用于物体轮廓绘制的双波长相移散斑干涉仪中，通常仅获得物体表面平行于观察方向的高度坐标（这里表示为z坐标）。为了通过相同的技术测量侧表面坐标x和y，光源在垂直于光轴的两个方向（表示为u和v）上移位。生成平行条纹的两个附加相位图，然后将其用于将横向坐标x和y分配给相机的对应像素。双波长干涉测量法的所有其他优点不受影响。
In a two-wavelength phase-shifting speckle interferometer for object contouring one usually obtains only the height coordinate of the object surface which is parallel to the viewing direction (here denoted as z-coordinate). In order to measure the lateral surface coordinates x and y by the same technique the light source is shifted in two directions (denoted as u and v) perpendicular to the optical axis. Two additional phase maps of parallel fringes are generated which are then used to assign the lateral coordinates x and y to the corresponding pixels of the camera. All the other advantages of two-wavelength interferometry remain unaffected.