Accurate displacement field measurement with scanning electron microscopy imaging
Accurate displacement field measurement with scanning electron microscopy imaging
复制标题
利用扫描电子显微镜成像精确测量位移场
DOI：
10.1177/0309324711405751
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发表时间：
2011
期刊：
影响因子：
--
通讯作者：
S. Yoneyama
中科院分区：
文献类型：
--
作者：
T. Arikawa;G. Murasawa;S. Yoneyama
本研究旨在通过将数字图像相关（DIC）应用于扫描电子显微镜（SEM）图像来准确测量位移场。首先，提出了一种去除SEM图像中出现的噪声和漂移的方法。其次，制作了一台紧凑的滑动机。第三，在光学显微镜和SEM下使用载玻片机进行平移测试。然后使用所提出的图像分析方法进行位移场计算。结果表明，该方法是适当的DIC的SEM图像的应用。
This study was undertaken to measure the displacement field accurately by application of digital image correlation (DIC) to scanning electron microscopy (SEM) images. First, a method of removing the noise and drift that arise in SEM images is proposed. Second, a compact slide machine is fabricated. Third, a translation test is performed under optical microscopy and SEM using the slide machine. Then a displacement field calculation is performed using the proposed image analysis method. The results show that the proposed method is adequate for the application of DIC to SEM images.