Chemical Analysis for Transient Response of Semiconductor Sensor by Autoregressive Model
Chemical Analysis for Transient Response of Semiconductor Sensor by Autoregressive Model
复制标题
利用自回归模型对半导体传感器瞬态响应进行化学分析
DOI：
10.1541/ieejsmas.125.129
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发表时间：
2005
影响因子：
--
通讯作者：
T. Oyabu
中科院分区：
文献类型：
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作者：
Shuichi Seto;Hiroyuki Kawabe;Yuko Shimomura;L. Shi;T. Katsube;T. Oyabu
本研究的目的是定性和定量分析的化学物种反应的半导体传感器的表面。在半导体传感器检测气体种类的研究中，研究者重视传感器的化学灵敏度，注意传感器在稳态时的输出值的响应特性。然而，瞬态响应，即，反应开始到反应平衡之间的区域，包含了气体与传感器表面反应的化学过程的大量信息。因此，在这项研究中，我们采用了自回归（AR）模型，其中描述指数曲线的参数进行了寻找。作为一个步骤，我们建立了传感器表面的反应模型，并假设它是气体分子中的一级反应。我们对化学过程进行了数学模拟，并将AR模型应用于信号。然后，我们重现的反应速率常数和初始振幅和识别的气体种类。
The objective of this study is qualitative and quantitative analysis of chemical species reacting to surface of semiconductor sensors. In ordinal studies on detection of gas species by semiconductor sensors, researchers attach importance to the chemical sensitivity of sensors and notice the output value of sensors in the stationary state of the response characteristics. However, the response in the transient state, i.e., the region between the beginning of reaction and the equilibrium of reaction, has much information of chemical processes of gases reacting to surface of sensor. Hence, in this study, we adopt an autoregressive (AR) model in which the parameters describing exponential curves are looked for. As a procedure, we construct a model of reaction on the surface of sensor and assume it as the first order reaction in gas molecule. We simulate the chemical processes mathematically, and apply the AR model on the signal. Then, we reproduce the reaction rate constants and the initial amplitudes and identify the species of gases.