Towards 3D optical integration by micro-transfer printing of ultra-thin membrane devices
Towards 3D optical integration by micro-transfer printing of ultra-thin membrane devices
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DOI：
10.1109/bicop.2018.8658325
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发表时间：
2018-12
期刊：
影响因子：
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通讯作者：
J. McPhillimy;C. Klitis;P. Hill;S. May;B. Guilhabert;M. Dawson;M. Sorel;M. Strain
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文献类型：
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作者：
J. McPhillimy;C. Klitis;P. Hill;S. May;B. Guilhabert;M. Dawson;M. Sorel;M. Strain
转移印刷是一种微组装技术，其已被用于使用通常厚度为几微米的膜来展示混合材料装置集成。为了实现集成光子器件的全3D集成，我们在这里介绍了尺寸低至10纳米的薄膜的制造和印刷。已经开发了牺牲层蚀刻和将独立式血小板组装到支撑基底上以允许在一系列材料平台上形成膜。器件被成功地印刷到主基板上，在现有的表面特征上显示出高度的机械柔性和构象。膜的多层打印显示了混合材料3D光子学的微组装路线。
Transfer printing is a micro-assembly technique that has been used to demonstrate hybrid material device integration using membranes, typically of a few microns in thickness. In order to target full 3D integration of integrated photonic devices, here we present the fabrication and printing of membranes with dimensions down to 10′s of nanometres. Both sacrificial layer etching and assembly of free standing platelets onto support substrates have been developed to allow membrane formation across a range of material platforms. Devices are successfully printed onto host substrates, showing a high degree of mechanical flexibility and conformation over existing surface features. Multilayer printing of membranes shows a route towards micro-assembly of hybrid material 3D photonics.