Structure, morphology and properties of Fe-doped ZnO films prepared by facing-target magnetron sputtering system
Structure, morphology and properties of Fe-doped ZnO films prepared by facing-target magnetron sputtering system
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DOI：
10.1016/j.apsusc.2009.03.008
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发表时间：
2009-05-15
影响因子：
6.7
通讯作者：
Zhang, Dong
中科院分区：
文献类型：
--
作者：
Wang, Changzheng;Chen, Zhong;Zhang, Dong
采用面靶磁控溅射法制备了一系列掺杂不同浓度铁的ZnO薄膜，并利用x射线衍射、拉曼光谱仪、x射线光电子能谱、扫描电镜、紫外可见分光光度计、谱仪等对其结构、形貌、光学性能和磁性能进行了研究。光度计和振动样品磁强计。结果表明，Fe在薄膜中呈2+价态。随着Fe掺杂浓度的增加，ZnO薄膜的晶体质量逐渐恶化，压缩应力逐渐增大。晶粒沿[0 0 2]方向呈柱状生长，晶粒平均尺寸随着Fe掺杂浓度的增加而单调减小。计算结果表明，随着Fe掺杂浓度的增加，薄膜的带隙减小，导致紫色发射峰发生红移。此外，由于ZnO晶粒边界的损耗区存在界面阱，随着Fe浓度的增加，紫色发射峰的强度增加。当Fe掺杂浓度小于0.028时，薄膜表现出顺磁性，当Fe掺杂浓度增加到0.041时，薄膜表现出弱铁磁性。(C) 2009 Elsevier B.V.版权所有
We have prepared a series of ZnO films with various concentrations of Fe dopant by using facing-target magnetron sputtering system and investigated their structure, morphology, optical properties and magnetic properties by means of the X-ray diffraction, Raman spectrometer, X-ray photoelectron spectroscopy, scanning electron microscope, UV-vis spectrophotometer, spectro. uorophotometer and vibrated sample magnetometer, respectively. The results showed Fe was in 2+ valence state in film. With increasing the concentration of Fe dopant the crystal quality deteriorated gradually and an increasing compressive stress occurred in ZnO films. All the grains grew with a columnar form along the [0 0 2] direction and the average size of grains decreased monotonically as the concentration of Fe dopant increased. The calculated results indicated that the band gap of films decreased with the increment of the concentration of Fe dopant, which resulted in the red-shift of violet emission peak. Moreover, the intensity of violet emission peak increased with the increment of Fe concentration because of the interface trap existing in depletion regions located at the ZnO grains boundaries. When the concentration of Fe dopant was smaller than 0.028, the films exhibited paramagnetic properties while the films displayed weak ferromagnetic properties when the concentration of Fe dopant increased to 0.041. (C) 2009 Elsevier B.V. All rights reserved.