Electrochemical analysis of carbon interdigitated microelectrodes
Electrochemical analysis of carbon interdigitated microelectrodes
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DOI：
10.1149/1.1390872
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发表时间：
1999-09-01
影响因子：
--
通讯作者：
Kinoshita, K
中科院分区：
文献类型：
--
作者：
Kostecki, R;Song, X;Kinoshita, K
描述了制造由叉指电极的图案化排列组成的碳微电极的过程。涉及光刻以在Si晶片上图案化光致抗蚀剂层的传统半导体加工技术允许一种方便的方法来形成叉指结构。然后光致抗蚀剂通过热解转化为碳。碘-碘化物氧化还原反应用于证明碳叉指电极的性能。 (C) 1999 年电化学协会。 S1099-0062(99)04-071-7。版权所有。
A procedure to fabricate carbon microelectrodes consisting of a patterned arrangement of interdigitated electrodes is described. Conventional semiconductor processing techniques involving photolithography to pattern photoresist layers on a Si wafer permit a convenient method to form the interdigitated structure. The photoresist is then converted to carbon by pyrolysis. The iodine-iodide redox reaction was used to demonstrate the performance of the carbon interdigitated electrode. (C) 1999 The Electrochemical Society. S1099-0062(99)04-071-7. All rights reserved.