An AFM-based Edge Profile Measuring Instrument for Diamond Cutting Tools
An AFM-based Edge Profile Measuring Instrument for Diamond Cutting Tools
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DOI：
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发表时间：
2007-04
影响因子：
1.9
通讯作者：
T. Asai;T. Motoki;W. Gao;Bingfeng Ju;S. Kiyono
中科院分区：
文献类型：
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作者：
T. Asai;T. Motoki;W. Gao;Bingfeng Ju;S. Kiyono
介绍了一种基于原子力显微镜（AFM）的金刚石刀具纳米级刃口轮廓测量装置。该仪器由一个组合的AFM单元和一个光学传感器组成，用于在亚微米范围内将AFM唇与金刚石切割工具边缘的顶部对准。在光学传感器中，激光束从激光二极管沿着Y轴发射，并在束腰处聚焦成直径约为10 μ m的小光斑。然后由光电二极管接收。首先通过在X-Z平面内调整工具边缘的顶部，同时监测光电二极管输出的变化，将工具边缘的顶部带入束腰中心。然后将切割工具撤回，并记录其在光束中心的顶部边缘位置。AFM针尖也可以以类似的方式定位在光束中心，以使其与切割边缘的顶部对准。为了减少光电二极管输出上的电子噪声干扰，从而提高对准精度，应用了一种技术，该技术可以通过用正弦电流驱动激光二极管来将光电二极管输出调制为AC信号。对金刚石刀具进行了对准实验和刃口轮廓测量，以验证该系统的性能。
This paper describes an atomic force microscope (AFM)-based instrument for measuring the nanoscale cutting edge profiles of diamond cutting tools. The instrument consists of a combined AFM unit and an optical sensor to align the AFM lip with the top of the diamond cut ling tool edge over a submicron range. In the optical sensor, a laser beam is emitted from a laser diode along the Y-axis and focused to a small beam spot with a diameter of approximately 10 ㎛ at the beam waist. which is then received by a photodiode. The top of the tool edge is first brought into the center of the beam waist by adjusting it in the X-Z-plane while monitoring the variation in the photodiode output. The cutting tool is then withdrawn and its top edge position at the beam center is recorded. The AFM tip can also be positioned at the beam center in a similar manner to align it with the top of the cutting edge. To reduce electronic noise interference on the photodiode output and thereby enhance the alignment accuracy, a technique is applied that can modulate the photodiode output to an AC signal by driving the laser diode with a sinusoidal current. Alignment experiments and edge profile measurements of a diamond cutting tool were carried out to verify the performance of the proposed system.