Fabrication and structural properties of AlN submicron periodic lateral polar structures and waveguides for UV-C applications
Fabrication and structural properties of AlN submicron periodic lateral polar structures and waveguides for UV-C applications
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DOI：
10.1063/1.4955033
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发表时间：
2016-06
影响因子：
4
通讯作者：
D. Alden;Wei Guo;R. Kirste;F. Kaess;I. Bryan;Tinkara Troha;A. Bagal;P. Reddy;L. Hernandez-Balderrama;A. Franke;S. Mita;Chih‐Hao Chang;A. Hoffmann;M. Zgonik;R. Collazo;Z. Sitar
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文献类型：
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作者：
D. Alden;Wei Guo;R. Kirste;F. Kaess;I. Bryan;Tinkara Troha;A. Bagal;P. Reddy;L. Hernandez-Balderrama;A. Franke;S. Mita;Chih‐Hao Chang;A. Hoffmann;M. Zgonik;R. Collazo;Z. Sitar
制备了用于紫外 - 可见区域非线性应用的具有亚微米畴宽的周期性极化氮化铝薄膜。开发了一种利用金属有机化学气相沉积生长氮化铝并结合激光干涉光刻的工艺，以制造畴尺寸低至600 nm的纳米级横向极性结构（LPS）。通过在氢氧化钾溶液中对周期性LPS进行湿法蚀刻以及随后的扫描电子显微镜（SEM）表征，确定了铝极性和氮极性畴。通过截面SEM确定了相邻畴之间完全融合且界限分明的垂直界面。对氮化铝LPS进行了机械抛光，在90μm×90μm的区域内实现了均方根值约为10 nm的表面粗糙度。制作了3.8μm宽、650 nm厚的氮化铝LPS波导。所实现的畴尺寸、表面粗糙度和波导适用于深紫外光谱中的二次谐波产生。
Periodically poled AlN thin films with submicron domain widths were fabricated for nonlinear applications in the UV-VIS region. A procedure utilizing metalorganic chemical vapor deposition growth of AlN in combination with laser interference lithography was developed for making a nanoscale lateral polarity structure (LPS) with domain size down to 600 nm. The Al-polar and N-polar domains were identified by wet etching the periodic LPS in a potassium hydroxide solution and subsequent scanning electron microscopy (SEM) characterization. Fully coalesced and well-defined vertical interfaces between the adjacent domains were established by cross-sectional SEM. AlN LPSs were mechanically polished and surface roughness with a root mean square value of ∼10 nm over a 90 μm × 90 μm area was achieved. 3.8 μm wide and 650 nm thick AlN LPS waveguides were fabricated. The achieved domain sizes, surface roughness, and waveguides are suitable for second harmonic generation in the UVC spectrum.