X-ray diffraction from laterally structured surfaces: Total external reflection.
X-ray diffraction from laterally structured surfaces: Total external reflection.
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横向结构化表面的 X 射线衍射：全外反射。
DOI：
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发表时间：
1995
期刊：
影响因子：
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通讯作者：
J. Kotthaus
中科院分区：
文献类型：
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作者：
Metin Tolan;Werner Press;F. Brinkop;J. Kotthaus
本文介绍了砷化镓表面光栅的x射线衍射测量结果。实验用三晶衍射仪进行。对5个样品进行了全外反射（小入射角）区域的测量，并与基于动态散射理论的模型计算结果进行了比较。这个理论能够定量地解释所有的实验。通过数据拟合得到了样品的介观光栅参数和微观表面粗糙度。对三个样品进行了扫描电镜成像。对这些图像的分析得出了与x射线衍射相同的介观参数。
In this work x-ray-diffraction measurements from GaAs surface gratings are presented. The experiments were performed using a three-crystal diffractometer. Measurements in the region of total external reflection (small incidence angles) for five samples were done and compared with model calculations based on a dynamical scattering theory. The theory is able to explain all experiments quantitatively. Mesoscopic grating parameters as well as microscopic surface roughnesses of the samples were obtained from fits of the data. For three samples scanning-electron-microscope pictures were taken. The analysis of these pictures leads to the same mesoscopic parameters as obtained from x-ray diffraction.