Electron‐temperature control by movable pins installed in a hollow cathode for discharge plasmas
Electron‐temperature control by movable pins installed in a hollow cathode for discharge plasmas
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通过安装在用于放电等离子体的空心阴极中的可移动销钉来控制电子温度
DOI：
10.1063/1.108913
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发表时间：
1993
影响因子：
4
通讯作者：
T. Takada
中科院分区：
文献类型：
--
作者：
N. Sato;S. Iizuka;T. Koizumi;T. Takada
为了控制放电等离子体中电子能量的分布，我们研制了一种内部有引脚的空心阴极。在弱磁化低压氩直流放电等离子体中，随着引脚长度的增加，电子温度连续下降一个数量级，并伴有局部等离子体结构的变化。
In order to control electron energy distributions in discharge plasmas, we have developed a new hollow cathode with pins inside. With an increase in the pin length, the electron temperature is observed to decrease continuously by an order of magnitude, being accompanied by a change of local plasma structure, in weakly magnetized low‐pressure Ar dc discharge plasmas.