H.Kinoshita and T.Murakami: "Intermittent Chemical Vapor Deposition of Thick Electrically Conductive Diamond-Like Amorphous Carbon Films Using-I-C_4H_<10>/N_2 Supermagnetron Plasma"J.Vac.Sci.Technol.A. Vol.20. 403-407 (2002)
H.Kinoshita and T.Murakami: "Intermittent Chemical Vapor Deposition of Thick Electrically Conductive Diamond-Like Amorphous Carbon Films Using-I-C_4H_<10>/N_2 Supermagnetron Plasma"J.Vac.Sci.Technol.A. Vol.20. 403-407 (2002)
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H.Kinoshita 和 T.Murakami:“使用-I-C_4H_<10>/N_2 超磁控等离子体间歇化学气相沉积厚导电类金刚石非晶碳膜”J.Vac.Sci.Technol.A。
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